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Excellent High Temperature Resistance in Diffusion Process

Excellent High Temperature Resistance in Diffusion Process

Excellent High Temperature Resistance in Diffusion Process

Product ID: Puruz P340

Puruz P340 is a special compound which exhibits high temperature resistance and is well-suited for both static and dynamic applications. It remains stable at service temperatures as high as 324°C, and has a low compression set for use in extreme diffusion, CVD, and dry processes. Class 100 post-cleaning and packaging is adapted for parts made from Puruz P340.



  • Valve seals
  • V-seals
  • Bell jar seals
  • Filter seals
  • Chamber seals
  • Lid seals
  • Gas inlet seals
  • Isolator valve seal
  • End point windows
  • Slit Valve seals
  • Window seals
  • KF fitting seals


Recommended Processes

  • Deposition: CVD, APCVD, HDPCVD..., PVD
  • Plasma etching: Oxide, Metal, Poly
  • Ashing
  • Ion implant
  • Remote plasma cleans
  • Diffusion
  • Rapid thermal process
  • Annealing
  • Excellent high temperature resistance
  • Excellent plasma resistance
  • Low out-gassing
Typical Physical Properties1
Physical Typical Value
Color Black
Hardness, Shore A2 76
Tensile Strength, MPa 13.5
Elongation, % 238
100% Modulus, MPa 6.28
Compression Set4:
70 hours @ 230°C @ 25% Deflection
70 hours @ 250°C
70 hours @ 290°C

Service Temperature Range -20°C~324°C
1 Accumulated Average data.
2 ASTM D2240 (AS 568A 214 O-ring test specimens)
3 ASTM D412 (Dumbbell test specimens)
4 ASTM D395B and ASTM D1414 (AS 568A 214 O-ring test specimens)
Any suggestions made regarding material selections or part designs in this literature are offered as suggestions only based on our experience and understanding of standard application. It is the responsibility of the user to determine full compliance in their particular use. MFC offers no expressed or implied warranties concerning form, fit, or function of any product in any application
Contact Detail
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