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ACCEPT AND PROCEED
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Product

Conventional Perfluoroelastomer

Conventional Perfluoroelastomer

Conventional Perfluoroelastomer

Product ID: Puruz® P315

Designed for wide applicability in a variety of situations, Puruz® P315 has an impressive range of features. Such features include: excellent chemical/plasma resistance with minimal metal extraction, good mechanical properties, and low out-gassing. It is also well-suited for both static and dynamic applications. Class 100 post-cleaning and packaging is adapted for parts made from Puruz P315.


 

Applications:

  • Slit valve doors
  • Gas inlet seals
  • Window seals
  • KF fitting seals
  • Gas feed-through seals
  • Chamber seals
  • Isolator valve seals
  • Lid seals

 

Recommended Processes

  • Deposition: CVD, APCVD, HDPCVD..., PVD
  • Plasma etching: Oxide, Metal, Poly
  • Ashing
  • Ion implant
  • Remote plasma cleans
  • Rapid thermal process
  • Wet metal plating

 

Features:
  • Excellent plasma resistance
  • Excellent chemical resistance
  • Excellent physical properties
  • Minimal metal extraction
  • Low out-gassing
Typical Physical Properties1
Physical Typical Value
Color White
Hardness, Shore A2 78
Mechanical3  
Tensile Strength, MPa 16.5
Elongation, % 176
100% Modulus, MPa 9.9
Compression Set4:
70 hours @ 200°C @ 25% Deflection

22
Thermal  
Service Temperature Range -20°C~230°C
1 Accumulated Average data.
2 ASTM D2240 (AS 568A 214 O-ring test specimens)
3 ASTM D412 (Dumbbell test specimens)
4 ASTM D395B and ASTM D1414 (AS 568A 214 O-ring test specimens)
Any suggestions made regarding material selections or part designs in this literature are offered as suggestions only based on our experience and understanding of standard application. It is the responsibility of the user to determine full compliance in their particular use. MFC offers no expressed or implied warranties concerning form, fit, or function of any product in any application
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