MFC Sealing Technology Co., Ltd.

News update(2011/Dec/30 16:41:49)

Fri, 30 Dec 2011 16:41:49 +0800

News update (2011/Dec/30 16:41:49)

Faq update(2011/Dec/7 09:41:24)

Wed, 7 Dec 2011 09:41:24 +0800

Faq update(2011/Dec/7 09:41:24)

Automotive Parts Agriculture Parts ()(2011/Feb/11 12:15:00)

Fri, 11 Feb 2011 12:15:00 +0800

Agriculture / Forklift / Heavy duty parts

Hydraulic seals
Gaskets
Oil seals, Radial shaft seals
O-rings
Wheel hub seals

(2011/Feb/11 12:15:00)

Automotive Parts Automatic Transmission Kit ()(2011/Jun/8 10:53:25)

Wed, 8 Jun 2011 10:53:25 +0800

We engineered and developed a special type of Polyacrylate rubber-automatic transmission kit, suited for the working condition and ATF, the type which benefits performance, reliability and prolongs seal life. All seals have passed for pressure test, life test, and field test. We supply all kits for major automatic transmission models.

If you're intersted in our automatic transmission kit, and would like to know more about it, please feel free to send your inquiry to us. We're always prepared to help you with our best services and products!
(2011/Jun/8 10:53:25)

Automotive Parts Axle Seals ()(2011/Feb/23 15:57:10)

Wed, 23 Feb 2011 15:57:10 +0800

Axle seals / hub seals

Oil bath seal is a seal specially designed for wheel hubs of bus, truck, and trailer. Oil bath seal generation has been developed to meet the ever-increasing requirements of environmental safety, long service life, simple handling, and superior total economy. The functions of oil seal, wear sleeve, and dust protection are integrated in the oil bath seal.

Our oil bath seal interchange with the following makers:

National Type 370000 series
CFW Type RWDR-Kassette
TRISEAL TYPE MVP
Freudenberg-NOK
Chicago Raw Type Scot Seal Plus
STEFA Type 500
STEMCO type Guardian

(2011/Feb/23 15:57:10)

Automotive Parts Brake Components ()(2011/Feb/23 15:44:04)

Wed, 23 Feb 2011 15:44:04 +0800

Brake Components

Dust caps for master cylinders and wheel cylinders
Boots for disc brake calipers

(2011/Feb/23 15:44:04)

Automotive Parts Compressor Seals ()(2011/Feb/11 13:53:54)

Fri, 11 Feb 2011 13:53:54 +0800

Compressor Seals

Gaskets, seals made for air compressor.
Commonly used material: HNBR

(2011/Feb/11 13:53:54)

Automotive Parts Crankshaft Seals ()(2011/Nov/10 13:53:40)

Thu, 10 Nov 2011 13:53:40 +0800

Crankshaft Seals

We offer genuine part quality and performance with substantial discount from the originals.(2011/Nov/10 13:53:40)

Automotive Parts Custom Designed Rubber Product ()(2011/Feb/11 13:58:50)

Fri, 11 Feb 2011 13:58:50 +0800

Custom designed rubber products

Pure rubber parts
Rubber bonded to metal parts.
Compression, transfer. And injection moulding, extruding, lathe cutting, stamping, and other fabricating services.
Assorted manual press machines special for small order services.
Fully automatic machinery equipped for making high volume parts
Various materials and hardness for all kinds of application, NR, SBR, ACM, EPDM, NBR and so on, depending on your requirements.
Size range: from 1.0 mm to 3000 mm.

(2011/Feb/11 13:58:50)

Automotive Parts Gaskets ()(2011/Feb/11 14:04:00)

Fri, 11 Feb 2011 14:04:00 +0800

Gaskets

Valve cover gaskets
Oil pan gaskets
Timing cover gaskets
Radiator gaskets

(2011/Feb/11 14:04:00)

Automotive Parts Mechanical Seals ()(2011/Feb/11 14:13:33)

Fri, 11 Feb 2011 14:13:33 +0800

Mechanical Seals

Mechanical seals are commonly used in a wide range of pump applications and designs, specifically used with automotive water pumps. It is excellent for residential and commercial water circulation, as well as intakes and discharge pumps.(2011/Feb/11 14:13:33)

Automotive Parts Power Steering Seals ()(2011/Feb/11 14:17:05)

Fri, 11 Feb 2011 14:17:05 +0800

Power steering seals

Sealing components of power assisted
steering shaftwith slow oscillating rotation.

Shaft seals
Pinion seals

(2011/Feb/11 14:17:05)

Automotive Parts Rubber Parts ()(2011/Feb/11 16:18:57)

Fri, 11 Feb 2011 16:18:57 +0800

Rubber products

Grommets, boots.
O-Rings, O-Ring kits, rubber washers
Compression, transfer. And injection moulding, extruding, lathe cutting, stamping, and other fabricating services.
Assorted manual press machines special for small order services.
Fully automatic machinery equipped for making high volume parts
Various materials and hardness for all kinds of application, NR, SBR, ACM, EPDM, NBR and so on, depending on your requirements.
Size range: from 1.0 mm to 3000 mm.

(2011/Feb/11 16:18:57)

Automotive Parts Shock Absorber Seals ()(2011/Feb/23 15:45:53)

Wed, 23 Feb 2011 15:45:53 +0800

Shock absorber seals

Seals specially designed for shock absorber, which usually is combination of high pressurized oil or gas.(2011/Feb/23 15:45:53)

Automotive Parts Universal Joint Seals ()(2011/Feb/23 15:46:41)

Wed, 23 Feb 2011 15:46:41 +0800

Universal joint seals

Seals are designed for universal joints, which allow the rod to bend in any direction.(2011/Feb/23 15:46:41)

Automotive Parts Valve Stem Seals ()(2011/Feb/11 16:28:14)

Fri, 11 Feb 2011 16:28:14 +0800

Valve stem seals

Used in engine and designed for valve stem.(2011/Feb/11 16:28:14)

Automotive Parts Engine Component ()(2012/Jan/22 12:15:58)

Sun, 22 Jan 2012 12:15:58 +0800

MFC supplies various engine component products as following,

Valve Stem Seal
Cranckshaft Seal
Oil Pan Gasket
Valve Cover Gasket
Cylinder Head Gasket
Timing Cover Gasket
Intake Manifold Gasket

The engine component mentioned above are all precisely made. By applying these items, the instrument you're useing can be promised to perform well with great quality. We are confidence in the quality of our products. With so many years of experience and professional knowledge, we develop quality parts and items that win reputation for us form the world trade market.

For more information, please send your inquiry to us. We're willing to offer the greatest help and engine component with fine quality for you.(2012/Jan/22 12:15:58)

Industrial Parts Backup Rings ()(2011/Feb/11 16:35:39)

Fri, 11 Feb 2011 16:35:39 +0800

Backup rings

A pure hard rubber piece is concave on one side relative to the o-ring shape, and good for use together with o-ring to prevent extrusion and nibbling where large clearance or high pressure exit.(2011/Feb/11 16:35:39)

Industrial Parts Bearing Seals ()(2011/Feb/11 16:38:20)

Fri, 11 Feb 2011 16:38:20 +0800

Bearing seals (S23)

Combine the strength of steel with advanced technology synthetic rubber to ensure ma. Bearing life.

Regularly used material: NBR, FKM, PA
Metallic material: Carbon steel, Stainless(2011/Feb/11 16:38:20)

Industrial Parts Bonded Seals ()(2011/Feb/11 16:51:05)

Fri, 11 Feb 2011 16:51:05 +0800

Bonded seals (S11, S50)

Standard bonded seals, MFC S11

Standard type is designed for better performance on the high and low pressure application to replace traditional washers
Regularly used material: NBR, FKM
Metallic material: Carbon steel, Stainless

Self-centering bonded seals, MFC S50

Self-centering type features preassembling on to the thread and prevents the seals offset
Regularly used material: NBR, FKM
Metallic material: Carbon steel, Stainless(2011/Feb/11 16:51:05)

Industrial Parts Custom Designed Rubber Product ()(2011/Feb/11 16:54:08)

Fri, 11 Feb 2011 16:54:08 +0800

Custom designed rubber products

Compression, transfer. And injection moulding, extruding, lathe cutting, stamping, and other fabricating services.
Assorted manual press machines special for small order services.
Fully automatic machinery equipped for making high volume parts
Various materials and hardness for all kinds of application, NR, SBR, ACM, EPDM, NBR and so on, depending on your requirements.
Size range: from 1.0 mm to 3000 mm.

(2011/Feb/11 16:54:08)

Industrial Parts Gamma Rings ()(2011/Feb/11 16:57:05)

Fri, 11 Feb 2011 16:57:05 +0800

Gamma Rings (S15)

An axial face contact seal with a protective metal ring suitable for tough environments.(2011/Feb/11 16:57:05)

Industrial Parts Gas Spring Seals ()(2011/Feb/11 16:59:00)

Fri, 11 Feb 2011 16:59:00 +0800

Gas spring seals

Seals are made for high pressure gas spring, generally prevent cylinder from dust in and gas out.(2011/Feb/11 16:59:00)

Industrial Parts Gaskets ()(2011/Feb/11 17:02:37)

Fri, 11 Feb 2011 17:02:37 +0800

Gaskets

Parts are used to fill the space between two mating surfaces, generally to prevent oil leakage.
(2011/Feb/11 17:02:37)

Industrial Parts Hydraulic Seals ()(2011/Feb/11 17:06:15)

Fri, 11 Feb 2011 17:06:15 +0800

Hydraulic & Pneumatic seals

Seals are designed for reciprocal movement of hydraulic and pneumatic equipment.

U-Cups (Symmetric, Piston, Rod seals)
Dust Seals
Buffer rings
Oil Seals
Wear Rings
Wipers (MFC Type W series)
V-Rings (MFC Type: S12, S13, S14, S18)
Other sealing solutions

(2011/Feb/11 17:06:15)

Industrial Parts Mechanical Seals ()(2011/Feb/11 17:09:39)

Fri, 11 Feb 2011 17:09:39 +0800

Mechanical Seals

Mechanical seals are commonly used in a wide range of pump applications and designs, specifically used with water pumps. It is excellent for residential and commercial water circulation, as well as intakes and discharge pumps.(2011/Feb/11 17:09:39)

Industrial Parts PTFE Products ()(2011/Feb/11 17:26:58)

Fri, 11 Feb 2011 17:26:58 +0800

PTFE products

A relatively inelastic material
Excellent resistant to chemicals
Large temperature range from -200°C up to 250°C.
Anti-adhesive surface and low friction

PTFE oil seals

PTFE lip oil seal is an oil seal for crankshaft of automobile engine. It can work reliably for a long term within the temperature range, -200°C up to 250°C for its special wide lip of structure, which lubricates the lip and takes the frictional heat away.(2011/Feb/11 17:26:58)

Industrial Parts Screw Caps ()(2011/Feb/11 17:47:58)

Fri, 11 Feb 2011 17:47:58 +0800

Screw caps (S19, S91)

The function for this item is used to protect the screw installed in the machine to ensure the long service life.(2011/Feb/11 17:47:58)

Industrial Parts Universal Joint Seals ()(2011/Feb/23 15:47:24)

Wed, 23 Feb 2011 15:47:24 +0800

Universal joint seals

Seals are designed for universal joints, which allow the rod to bend in any direction.(2011/Feb/23 15:47:24)

Industrial Parts X-Ring ()(2011/Feb/11 17:55:51)

Fri, 11 Feb 2011 17:55:51 +0800

X-Rings (S22)

A four lip seal
Sizes and compounds corresponds to those of o-ring but with higher sealing efficiency and lower friction than o-rings
Commonly used material: NBR, FKM, and so on.(2011/Feb/11 17:55:51)

Industrial Parts Rubber Washers ()(2011/Feb/14 10:12:20)

Mon, 14 Feb 2011 10:12:20 +0800

Rubber Washers (S24)

Products are usually used to reduce vibration or acted as gaskets, and generally discussed by outer diameter (OD), inner diameter(ID), and height (H)(2011/Feb/14 10:12:20)

Industrial Parts V-Rings ()(2011/Feb/14 10:26:44)

Mon, 14 Feb 2011 10:26:44 +0800

V-Rings

An axial face contact rubber seal can increase the service life for both bearing and oil seal.(2011/Feb/14 10:26:44)

O-Rings / O-Ring Kits O Ring ()(2011/Oct/4 17:05:56)

Tue, 4 Oct 2011 17:05:56 +0800

Started with o ring manufacturing and pure rubber parts producing, MFC’s subsidiary, MFC Shenzhen plant was established in 1991. In 1995, MFC ushered CNC, the automation of machine tools, in Taipei and Shenzhen plant and started making tools in house. The advanced tooling equipment like the o ring can increase customer satisfactory due to tooling cost reduction, quality improvements, and product precision.

The o ring usually applies to static or dynamic applications. Due to its low-cost merit, they are one of the most common seals elements used in machine. The simplicity of its shape doesn’t lose its importance value to the machine. With the use of the o-rings, you can prevent the leakage of gas or fluids. Moreover, MFC also provides o-ring kits to offer you a more convenient and practical working environment. Please do not hesitate and contact with us for our quality o ring.

General:

The o ring is the most popular and inexpensive sealing element. Although it looks simple, it is an important implement of preventing needless leakage of gas or fluids.

Description:

The dimensions of the o-ring are usually defined by ID (inter diameter) and CS (cross section)

O Ring Kits:

We also would like to introduce you our practical and convenient kits. You will find that we supply kits that cone in metric, inch, and the Japanese JIS P&G standard. In addition, you also have a variety of materials to choose from. Just look through the different kits that we will be introducing to you. You will surely find one that you need.

(2011/Oct/4 17:05:56)

Oil Seals / Radial Shaft Seals Oil Seal ()(2012/Jan/22 12:27:48)

Sun, 22 Jan 2012 12:27:48 +0800

Introduction:

MFC supplies high level radial lip seal products successfully for over 35 years of experience; the oil seal can be applied to various applications. MFC led in CNC tool making in 1995, and its subsidiaries, MFC Shanghai plant started tool making in 1995. Not only did MFC group obtained ISO-9002 certification in 90s, but it was certified by QS 9000 and has been approved by TS 16949 since 2005 as well.

Warranty of the oil seal:

MFC warrants that all products sold shall be free from defects in material and workmanship for a period of one year from date of shipment. At our option, products like oil seal or any other items prove unable to meet the sealing and design capabilities for which it was produced shall be replaced free of charge including transportation charges. All other warranties, expressed or implied, including warranty of merchantability, are hereby disclaimed. We shall not be responsible for consequential damages.

Material and specifications:

The most important component of oil seal is the elastomer material. You must consider about the environmental conditions and the functions of the seal as following:
- Good chemical resistance
- Good resistance to heat and low temperature
- Good resistance to ozone and weathering
- High resistance to water
- Low compression set
- Good elasticity
- Raw material cost

All major compounds of the oil seal are available: NBR, FKM, PA, SIICONE

Design:

Standard lip and case design
Special lip and case design:

The MFC product line is not limited to listed in the standard lip and case design. We are able to provide virtually any size and type shaft seal.

MFC special helix design:

The sealing lip’s performance of the Oil seal can be improved by the use of a hydrodynamics aid or helix. The helix is engraved on the primary lip and caused a pumping action to push any medium back towards the fluid side. There are designs available for bidirectional, lift, and right hand shaft rotations as below.

(2012/Jan/22 12:27:48)

Semi, Solar & LCD O-rings ()(2011/Feb/14 12:12:09)

Mon, 14 Feb 2011 12:12:09 +0800

O-rings

MFC provide customer with perfect material to fit various purpose.

High temperature resistance
Plasma resistance
Low particle generation / highest purity
Extended lifetime
Cost down purpose

Size offer

FFKM molded type:0.60mm~1000mm
FKM molded type:0.60mm~3000mm
FKM spliced type:3000mm~No limited
Material: FFKM, FKM, Silicone, Fluorosilicone, PTFE, NBR, EPDM, CR, PU, Fluoro Silicone, etc.
Standards include AS568A, DIN 3771, JIS B2401, etc.

Puruz O-ring (Perfluoroelastomer for Semi, Solar & LCD industry)(2011/Feb/14 12:12:09)

Semi, Solar & LCD Bonded Slit Valve Door ()(2011/Feb/14 12:24:43)

Mon, 14 Feb 2011 12:24:43 +0800

Bonded Slit Valve & Gate Valve Door

Application:
Used on process chamber or load luck for Thin film, etching process

Product Line:
Material: Available in
Puruz Bonded Slit Valve Door
FKM Bonded Slit Valve Door

8" Bonded type:

Low Particle
Prevent metal contact
Extend life time
12" Patented assembly type
Easy installation
Cost effective solution

Specially designed to

prevent metal to metal contact
extend life time
minimize abrasion and particle

(2011/Feb/14 12:24:43)

Semi, Solar & LCD Gate Valve Seals ()(2011/Feb/14 12:31:09)

Mon, 14 Feb 2011 12:31:09 +0800

Gate Valve Seal

Custom Made Sealing Solution for Dynamic seal for LCD and Semi-conductor Industry

1) FKM Gate Valve Seal

Special Polymer for Dynamic application
Custom made profile to fit grove perfectly
Least Particle generation and extend life time

2) Puruz Gate Valve Seal:
for TFT/LCD gate door
Feature:

Perfect Chemical resistance
Plasma resistance
Easy installation
Least particle generation
Extend life time

(2011/Feb/14 12:31:09)

Semi, Solar & LCD Membrane ()(2011/Feb/14 13:47:52)

Mon, 14 Feb 2011 13:47:52 +0800

Membrane

Application:

CMP process

Use specialized abrasion resistant compound
Maintain thickness consistence within 0.05mm
Can be re-designed for customer-specific application

(2011/Feb/14 13:47:52)

Semi, Solar & LCD Gaskets ()(2011/Feb/14 13:51:27)

Mon, 14 Feb 2011 13:51:27 +0800

Gaskets

Application: Bumping
process (Electroplating)

Feature:
Special polymer with excellent chemical resistance.
Maintain good mechanical properties for the dynamic application to fit customer's requirement.
Perfect sealing application for bomping process.
(2011/Feb/14 13:51:27)

Semi, Solar & LCD Robot Pad ()(2011/Oct/27 16:34:28)

Thu, 27 Oct 2011 16:34:28 +0800

Robot Pad

Application:
Manufacturing Process: Semicon & LCD, Solar Industry, etc.

Tool:
AKT, ULVAC, TEL, YAC and various tool.

Feature:

High friction, no slip risk
No static electricity
No contamination

(2011/Oct/27 16:34:28)

Semi, Solar & LCD Puruz Robot Pad ()(2011/Oct/27 16:30:45)

Thu, 27 Oct 2011 16:30:45 +0800

Puruz Robot Pad

For semiconductor, LCD process, AKT, ULVAC, and various tools.

Feature:

High temperature resistance
High friction, no slip risk
No static electricity
No contamination

(2011/Oct/27 16:30:45)

Semi, Solar & LCD Spring Seal ()(2011/Feb/14 16:19:00)

Mon, 14 Feb 2011 16:19:00 +0800

Spring Seal

Application:
Control valve for mass flow control system.
Robot cylinder for all process, oil-free environment.
Provide more durable elasticity than regular sealing material.(2011/Feb/14 16:19:00)

Semi, Solar & LCD Vacuum Pump Parts ()(2011/Feb/14 16:24:55)

Mon, 14 Feb 2011 16:24:55 +0800

Vacuum Pump Parts

Product line includes:

Lip Seals
Puruz Center Ring
Center Ring (Stainless, Aluminum, FFKM, FKM, PTFE)
O-ring

Application:
All Vacuum Application (Kasiyama, Edward, Ebara, Turbo Pumps & Pipeline)(2011/Feb/14 16:24:55)

Semi, Solar & LCD Patented Wafer Seal ()(2011/Feb/14 16:41:47)

Mon, 14 Feb 2011 16:41:47 +0800

Patented Wafer Seal

Application:

Sputter process
AMAT/ Centura

Perfect solution for wafer transfer

High friction / Prevent wafer slide
Design to prevent pad cling to wafer
Easy installation

(2011/Feb/14 16:41:47)

Semi, Solar & LCD Patented ESC Sealing Parts ()(2011/Feb/14 17:00:44)

Mon, 14 Feb 2011 17:00:44 +0800

Patented ESC Sealing Parts

Application:

Dry Etching process-LAM
Perfect sealing solution for ESC side wall

Recycle ESC with helium leak
Cost effective solution
Helium flow (with patented parts) < 0.5 sccm
Plasma resistance & high purity
Prevent silicone damage

(2011/Feb/14 17:00:44)

Other Applications Other Applications ()(2011/Feb/14 17:24:04)

Mon, 14 Feb 2011 17:24:04 +0800

Other applications

Besides excellent performance and experience in automotive and industrial products, MFC is eager to develop more products to provide it sealing solution to other different industries, including:

Seals for dish washers, washing machines, drink dispensers, and blenders
Kitchen and bath

Products:

Oil seals / Radial shaft seals
O-Rings / O-Ring kits
Mechanical seals

(2011/Feb/14 17:24:04)

Puruz>Puruz Material Minimal Particulation in Plasma Process (Puruz 7508 perfluoroelastomer parts)(2011/Feb/15 09:43:10)

Tue, 15 Feb 2011 09:43:10 +0800

Puruz 7508 is a compound specifically developed for select semiconductor plasma and gas deposition processes. This ultra-pure compound offers excellent chemical compatibility and very low particle generation in oxygen and fluorine containing plasmas versus those mineral-filled compounds. It is well-suited for both static and low stress/low sealing force applications, i.e., slit valve door, gas feed-through, chamber lid, etc. It remains stable at service temperatures as high as 200°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7508.

Applications:

Slit valve doors
Gas inlet seals
Window seals
KF fitting seals
Gas feed-through seals
Chamber seals
Isolator valve seals
Lid seals

Recommended Processes

Deposition: CVD, APCVD, HDPCVD..., PVD
Plasma etching: Oxide, Metal, Poly
Stripping
Ion implant
Remote plasma cleans

(2011/Feb/15 09:43:10)

Puruz>Puruz Material Minimal Contamination in Plasma Process (Puruz 7509 perfluoroelastomer parts)(2011/Feb/15 09:42:04)

Tue, 15 Feb 2011 09:42:04 +0800

Puruz 7509 is a compound specifically developed for select semiconductor plasma and gas deposition processes. This ultra-pure compound offers excellent chemical compatibility and very low particle generation in oxygen and fluorine containing plasmas. It is well-suited for both static and low stress/low sealing force applications, i.e., slit valve door, gas feed-through, chamber lid, etc where temperatures do not exceed 200°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7509.

Applications:

Slit valve doors
Gas inlet seals
Window seals
KF fitting seals
Gas feed-through seals
Chamber seals
Isolator valve seals
Lid seals

Recommended Processes

Deposition: CVD, APCVD, HDPCVD..., PVD
Plasma etching: Oxide, Metal, Poly
Stripping
Ion implant
Remote plasma cleans
Wet metal plating

(2011/Feb/15 09:42:04)

Puruz>Puruz Material Conventional Perfluoroelastomer (Puruz 7516)(2011/Feb/15 10:07:52)

Tue, 15 Feb 2011 10:07:52 +0800

Puruz 7516 is a compound which is designed for use in wide variety of applications. This product exhibits excellent chemical resistance with minimal metal extraction and good mechanical properties, and is well-suited for both static and dynamic applications. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7516.

Applications:

Slit valve doors
Gas inlet seals
Window seals
KF fitting seals
Gas feed-through seals
Chamber seals
Isolator valve seals
Lid seals

Recommended Processes

Deposition: CVD, APCVD, HDPCVD..., PVD
Plasma etching: Oxide, Metal, Poly
Ashing
Ion implant
Remote plasma cleans
Rapid thermal process
Wet metal plating

(2011/Feb/15 10:07:52)

Puruz>Puruz Material Excellent Chemical Resistance in Wet Process (Puruz 7517)(2011/Feb/15 10:18:10)

Tue, 15 Feb 2011 10:18:10 +0800

Puruz 7517 is designed specifically for the chemical process and is recommended for use in wet processes where chemical compatibility is required. This product is an excellent option for use in bases, acids, amines, steam, and many other aggressive chemicals. It exhibits excellent chemical resistance with minimal metal extraction and good mechanical properties, and is well-suited for both static and dynamic applications. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7517.

Applications:

Valve seals
V-seals
Bell jar seals
Filter seals
Chamber seals
Lid seals
Gas inlet seals
Isolator valve seals
End point windows
Slit Valve seals
Window seals
KF fitting seals

Recommended Processes

Deposition: CVD, PVD
Wet stripper(Solvents)
Wet etching
Wet cleaning
Wet metal plating

(2011/Feb/15 10:18:10)

Puruz>Puruz Material Minimal Contamination in Plasma Process (Puruz 7529 perfluoroelastomer parts)(2011/Dec/5 18:13:49)

Mon, 5 Dec 2011 18:13:49 +0800

Puruz 7529 is a compound specifically developed for plasma and gas deposition processes where seal reliability and very minimal contamination are essential. This material provides excellent chemical compatibility and is available in an infinite geometries and cross sections. It has been specifically formulated for minimal particle generation in oxygen and fluorine containing plasmas and is well-suited for both static and dynamic applications, i.e., slit valve door, gas feed-through, chamber lid, etc. It remains stable at service temperatures as high as 230°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7529.

Applications:

Slit valve doors
Gas inlet seals
Window seals
KF fitting seals
Gas feed-through seals
Chamber seals
Isolator valve seals
Lid seals

Recommended Processes

Deposition: CVD, APCVD, HDPCVD..., PVD
Plasma etching: Oxide, Metal, Poly
Ashing
Ion implant
Remote plasma cleans

(2011/Dec/5 18:13:49)

Puruz>Puruz Material Minimal Contamination in Plasma Process (Puruz 7530 perfluoroelastomer parts)(2011/Feb/15 11:06:10)

Tue, 15 Feb 2011 11:06:10 +0800

Puruz 7530 is a compound specifically developed for deposition processes. It has also exhibited excellent etching and stripping process applications. This material provides excellent chemical compatibility and is available in an infinite geometries and cross sections. It has been specifically formulated for ultra-low particle generation in oxygen and fluorine containing plasmas and is well-suited for both static and dynamic applications, i.e., slit valve door, gas feed-through, chamber lid, etc. It remains stable at service temperatures as high as 230°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7530.

Applications:

Slit valve doors
Gas inlet seals
Window seals
KF fitting seals
Gas feed-through seals
Chamber seals
Isolator valve seals
Lid seals

Recommended Processes

Deposition: CVD, APCVD, HDPCVD..., PVD
Plasma etching: Oxide, Metal, Poly
Ashing
Ion implant
Remote plasma cleans

(2011/Feb/15 11:06:10)

Puruz>Puruz Material Excellent Chemical and Temperature Resistance (Puruz 7536)(2011/Feb/15 11:14:51)

Tue, 15 Feb 2011 11:14:51 +0800

Puruz 7536 is a carbon black-filled compound with good chemical and mechanical properties, and low compression set for general-purpose use in o-rings, diaphragms, seals, and other parts used in the semi- and TFT-LCD industries. It exhibits good response to temperature cycling effects and is well-suited for both static and dynamic applications, i.e., slit valve door, gas feed-through, chamber seal, etc. It remains stable at service temperatures as high as 260°C. This product also exhibits excellent chemical resistance with minimal metal extraction. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7536.

Applications:

Valve seals
V-seals
Bell jar seals
Filter seals
Chamber seals
Lid seals
Gas inlet seals
Isolator valve seal
End point windows
Slit Valve seals
Window seals
KF fitting seals

Recommended Processes

Deposition: CVD, APCVD, HDPCVD..., PVD
Plasma etching: Oxide, Metal, Poly
Ashing
Ion implant
Remote plasma cleans
Rapid thermal process
Wet stripper
Wet etching
Wet cleaning

(2011/Feb/15 11:14:51)

Puruz>Puruz Material Excellent High Temperature Resistance in Diffusion Process (Puruz 7537)(2011/Feb/15 11:19:57)

Tue, 15 Feb 2011 11:19:57 +0800

Puruz 7537 is a carbon black-filled compound with good mechanical properties, and low compression set for use in extreme diffusion, CVD and dry process. It exhibits good response to high temperature stability and is well-suited for both static and dynamic applications. It remains stable at service temperatures as high as 324°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7537.

Applications:

Valve seals
V-seals
Bell jar seals
Filter seals
Chamber seals
Lid seals
Gas inlet seals
Isolator valve seal
End point windows
Slit Valve seals
Window seals
KF fitting seals

Recommended Processes

Deposition: CVD, APCVD, HDPCVD..., PVD
Plasma etching: Oxide, Metal, Poly
Ashing
Ion implant
Remote plasma cleans
Diffusion
Rapid thermal process
Annealing

(2011/Feb/15 11:19:57)

Puruz>Puruz Material Excellent High Temperature Resistance (Puruz 8010)(2011/Feb/15 11:28:56)

Tue, 15 Feb 2011 11:28:56 +0800

Puruz 8010 is a carbon black-filled compound with good mechanical properties, and low compression set for general-purpose use in o-rings, diaphragms, seals, and other parts used in the semi- and TFT-LCD industries. It exhibits good response to temperature cycling effects and is well-suited for both static and dynamic applications, i.e., slit valve door, gas feed-through, chamber seal, etc. It remains stable at service temperatures as high as 315°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 8010. This compound is not recommended for use in aggressive acid/base wet processes.

Applications:

Valve seals
V-seals
Bell jar seals
Filter seals
Chamber seals
Lid seals
Gas inlet seals
Isolator valve seal
End point windows
Slit Valve seals
Window seals
KF fitting seals

Recommended Processes

Deposition: CVD, PVD
Plasma etching: Oxide, Metal, Poly
Ion implant
Diffusion
Rapid thermal process
Dry etching

(2011/Feb/15 11:28:56)

Puruz>Puruz Material For Harsher Plasma and Higher Sealing Loads (Puruz 9007)(2011/Feb/15 11:41:01)

Tue, 15 Feb 2011 11:41:01 +0800

Puruz 9007 is a mineral filled compound which is designed for use in wide variety of semiconductor dry-etch processing applications where small amounts of contamination are acceptable. This product exhibits excellent performance in oxygen and fluorine-based plasmas. Puruz 9007 is formulated in high sealing load applications and remains stable at service temperatures as high as 230°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 9007.

Applications:

Slit valve doors
Gas inlet seals
Window seals
KF fitting seals
Gas feed-through seals
Chamber seals
Isolator valve seals
Lid seals

Recommended Processes

Deposition: CVD, PECVD, HDPCVD...,PVD
Plasma etching: Oxide, Metal, Poly
Ashing
Ion implant
Remote plasma cleans
Rapid thermal process

(2011/Feb/15 11:41:01)

Material Acrylonitrile Butadiene Rubber (NBR) ()(2011/Feb/22 15:52:30)

Tue, 22 Feb 2011 15:52:30 +0800

Advantage:

1. Has good solvent, oil, water and hydraulic fluid resistance.

2. Good compression set, abrasion resistance and tensile strength.

Disdvantage:

1. Not recommended for using in highly polar solvents such as acetone, and MEK, ozone, chlorinated hydrocarbons and nitro hydrocarbons.

(2011/Feb/22 15:52:30)

Material Butyl Rubber ()(2011/Feb/23 10:21:58)

Wed, 23 Feb 2011 10:21:58 +0800

Advantage:

1. Impermeable to most common gasses.

2. Good resistance to sunlight and ozone Normally satisfactory when exposed to animal and vegetable oils and oxidizing chemicals.

Disdvantage:

1. Not recommended for use with petroleum solvent, coal tar and aromatic hydrocarbons.

(2011/Feb/23 10:21:58)

Material Chloroprene Rubber (CR) ()(2011/Feb/23 10:27:02)

Wed, 23 Feb 2011 10:27:02 +0800

Advantage:

1. High resilience with low compression set.

2. flame resistance.

3. Compounds free of sulphur are easily made.

4. Animail and vegetable oil resistance.

5. Not affected by moderate chemicals, fats, greases and many oils and solvents.

Disdvantage:

1. Not recommended for strong oxidizing acids, esters, ketones, chlorinated aromatic and nitro hydrocarbons.

(2011/Feb/23 10:27:02)

Material Ethylene Propylene Rubber (EPDM) ()(2011/Feb/23 10:30:30)

Wed, 23 Feb 2011 10:30:30 +0800

Advantage:

1. Exceptionally good weather aging and ozone resistance.

2. Excellent water and chemical resistance.

3. Excellent resistance to gas permeability and aging due to exposure to steam.

4. Excellent resistance up to 350°F.

5. Good in ketones and Alcohols.

Disdvantage:

1. Not recommended for food applications or exposure to aromatic hydrocarbons.

(2011/Feb/23 10:30:30)

Material Fluoro Elastomers (FKM/FPM) ()(2011/Feb/23 10:35:52)

Wed, 23 Feb 2011 10:35:52 +0800

Advantage:

1. Heat resistance up to 600°F

2. Resistance to wide range of oils and solvents; specially all aliphatic, aromatic and halogenated hydrocarbons, acids, animal and vegetable oils.

Disdvantage:

1. Not recommended for ketones, low molecular weight esters and nitro containing compounds.

(2011/Feb/23 10:35:52)

Material Fluorosilicone Rubber (FVMQ) ()(2011/Feb/23 10:39:44)

Wed, 23 Feb 2011 10:39:44 +0800

Advantage:

1. More expensive than silicone, and for special applications where general resistance to oxidizing chemicals, aromatic and chlorinated solvent bases is required.

Disdvantage:

1. Not recommended for and general attacked when exposed to brake fluids, hydrazine and ketones.

2. Should not be confused with silicone in regard to high heat resistance.

(2011/Feb/23 10:39:44)

Material Hydrogenated Acrylonitrile Rubber (HNBR) ()(2011/Feb/23 10:43:03)

Wed, 23 Feb 2011 10:43:03 +0800

Advantage:

1. Exhibit better wear resistance than standard nitrile.

2. Excellent abrasion, compression set, tensiles, and tear properties.

3. Good resistance to ozone, sunlight, and other atmospheric conditions.

4. Vastly improved resistance to heat aging up to 300¢XF range and, for short periods, in the 350¢XF range available material exhibits a low temperature range -40°F.

Disdvantage:

1. Not recommended for exposure to ketone, esters, and aromatic fluids.

(2011/Feb/23 10:43:03)

Material Natural Rubber (NR) ()(2011/Feb/23 10:46:00)

Wed, 23 Feb 2011 10:46:00 +0800

Advantage:

1. High resilience.

2. Good compression set.

3. Food roll building behavior and molding properties.

4. Good friction surface, but not a fine smooth surface when ground.

5. High tear strength.

6. Low crack growth.

7. Good low temperature.

8. Usable for ketones and alcohol.

9. Good low temperature properties.

Disdvantage:

1. Not recommended for oil and solvent resistance and ozone attacks it.

(2011/Feb/23 10:46:00)

Material Polyacrylate rubber (PA/ACM) ()(2011/Feb/23 10:50:58)

Wed, 23 Feb 2011 10:50:58 +0800

Advantage:

1. Excellent ozone, weather and hot air resistance.

2. Excellent resistance to lubricants containing many additives at high temperature.

3. Mainly used in automotive application.

Disdvantage:

1. Only a medium physical strength and low elasticity.

2. Not recommended for ketones, low molecular weight esters and nitro containing compounds.

(2011/Feb/23 10:50:58)

Material Styrol butadiene rubber (SBR) ()(2011/Feb/23 10:54:31)

Wed, 23 Feb 2011 10:54:31 +0800

Advantage:

1. Low cost non-oil resistance material.

2. Good water resistance and resilience up to 70 durometer.

3. Satisfactory for most moderate chemical and wet or dry organic acids.

Disdvantage:

1. Not recommended for ozone, strong acids, oils, greases, fats and most hydrocarbons.

2. Not recommended for ketones, low molecular weight esters and nitro containing compounds.

(2011/Feb/23 10:54:31)

Material Silicone Rubber (VMQ) ()(2011/Feb/23 10:57:03)

Wed, 23 Feb 2011 10:57:03 +0800

Advantage:

1. Being compounded to have tensile in the area of 1500 PSI and tear up to 200 lbs.

2. Low compression set and good resilience.

3. moderate solvent resistance.

4. Excellent heat resistance.

5. Good release characteristics.

6. Extreme low temperature properties.

7. Highly resistance to oxidation and ozone attack.

Disdvantage:

1. Not recommended for most concentrated solvents, oils, concentrated acids and dilute sodium hydroxide.

(2011/Feb/23 10:57:03)

Material Materials for Drinking Water (FDA/NSF/WARS) ()(2011/Oct/31 15:20:47)

Mon, 31 Oct 2011 15:20:47 +0800

MFC is proud of supplying various compounds approved by NSF, FDA and WRAS.

(2011/Oct/31 15:20:47)