Conventional Perfluoroelastomer
Conventional Perfluoroelastomer
Product ID: Puruz P315
Puruz P315 is a compound which is designed for use in wide variety of applications. This product exhibits excellent chemical resistance with minimal metal extraction and good mechanical properties, and is well-suited for both static and dynamic applications. Class 100 post-cleaning and packaging is adapted for parts made from Puruz P315.
Applications:
- Slit valve doors
- Gas inlet seals
- Window seals
- KF fitting seals
- Gas feed-through seals
- Chamber seals
- Isolator valve seals
- Lid seals
Recommended Processes
- Deposition: CVD, APCVD, HDPCVD..., PVD
- Plasma etching: Oxide, Metal, Poly
- Ashing
- Ion implant
- Remote plasma cleans
- Rapid thermal process
- Wet metal plating
Features:
- Excellent plasma resistance
- Excellent chemical resistance
- Excellent physical properties
- Minimal metal extraction
- Low out-gassing
Product