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Minimal Contamination in Plasma Process

Minimal Contamination in Plasma Process

Minimal Contamination in Plasma Process

Product ID: Puruz P325 perfluoroelastomer parts

Specifically designed for plasma and gas deposition processes, the Puruz P325 features excellent seal reliability and minimal contamination. Its properties include minimal particle generation in oxygen and fluorine containing plasmas as well as excellent chemical compatibility. In addition, the Puruz P325 is offered in various geometries and cross sections and is particularly well suited for static and dynamic applications such as slit valve door, gas feed-through, chamber lids, etc. It remains stable at service temperatures as high as 275°C. Puruz P325-made parts are adapted for Class 100 post-cleaning and packaging.



  • Slit valve doors
  • Gas inlet seals
  • Window seals
  • KF fitting seals
  • Gas feed-through seals
  • Chamber seals
  • Isolator valve seals
  • Lid seals


Recommended Processes

  • Deposition: CVD, APCVD, HDPCVD..., PVD
  • Plasma etching: Oxide, Metal, Poly
  • Ashing
  • Ion implant
  • Remote plasma cleans


  • Excellent oxygen, chlorine, and fluorine compatibility
  • Minimal particle generation
  • Excellent chemical and physical properties
  • Unlimited design flexibility
  • Low out-gassing
Typical Physical Properties1
Physical Typical Value
Color White
Hardness, Shore A2 75
Tensile Strength, MPa 15.6
Elongation, % 188
100% Modulus, MPa 5.85
Compression Set4:
70 hours @ 200°C @ 25% Deflection

Service Temperature Range -20°C~275°C
1 Accumulated Average data.
2 ASTM D2240 (AS 568A 214 O-ring test specimens)
3 ASTM D412 (Dumbbell test specimens)
4 ASTM D395B and ASTM D1414 (AS 568A 214 O-ring test specimens)
Any suggestions made regarding material selections or part designs in this literature are offered as suggestions only based on our experience and understanding of standard application. It is the responsibility of the user to determine full compliance in their particular use. MFC offers no expressed or implied warranties concerning form, fit, or function of any product in any application
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