Product

Excellent High Temperature Resistance in Diffusion Process

For Harsher Plasma and Higher Sealing Loads

More Details

 

Product ID: Puruz P515

Puruz P515 is a specific compound with excellent mechanical properties. It has a low compression set for high temperature application use in o-rings, diaphragms, seals, and other components of the semiconductor and TFT-LCD industries. It has a good response to temperature cycling effects, remaining stable at service temperatures as high as 315°C. It is well-suited for both static and dynamic applications such as slit valve doors, gas feed-throughs, and chamber seals etc. Class 100 post-cleaning and packaging is adapted for parts made from Puruz P515.

Applications:

• Valve seals
• Bell jar seals
• Chamber seals
• Gas inlet seals
• End point windows
• Window seals
• KF fitting seals (center rings)
• V-seals
• Filter seals
• Lid seals
• Isolator valve seals
• Slit valve seals

Recommended Processes

• Deposition: CVD, PVD
• Plasma etching: Oxide, Metal, Poly
• Ion implant
• Diffusion
• Rapid thermal process
• Dry etching