Product

Conventional Perfluoroelastomer

Conventional Perfluoroelastomer

More Details

 

Product ID: Puruz P315

Designed for wide applicability in a variety of situations, Puruz P315 has an impressive range of features. Such features include: excellent chemical/plasma resistance with minimal metal extraction, good mechanical properties, and low out-gassing. It is also well-suited for both static and dynamic applications. Class 100 post-cleaning and packaging is adapted for parts made from Puruz P315.

Applications:

• Slit valve doors
• Gas inlet seals
• Window seals
• KF fitting seals
• Gas feed-through seals
• Chamber seals
• Isolator valve seals
• Lid seals

Recommended Processes

• Deposition: CVD, APCVD, HDPCVD..., PVD
• Plasma etching: Oxide, Metal, Poly
• Ashing
• Ion implant
• Remote plasma cleans
• Rapid thermal process
• Wet metal plating