O-rings, Bonded Slit Valve Door, Gate Valve Seals, Membrane, Gaskets
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[1]
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Semi, Solar & LCD
[11]
O-rings
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Other Applications
[1]
Other Applications
Puruz
[2]
Puruz Material
[10]
Minimal Particulation in Plasma Process
(Puruz 7508 perfluoroelastomer parts)
Minimal Contamination in Plasma Process
(Puruz 7509 perfluoroelastomer parts)
Conventional Perfluoroelastomer
(Puruz 7516)
Excellent Chemical Resistance in Wet Process
(Puruz 7517)
Minimal Contamination in Plasma Process
(Puruz 7529 perfluoroelastomer parts)
Minimal Contamination in Plasma Process
(Puruz 7530 perfluoroelastomer parts)
Excellent Chemical and Temperature Resistance
(Puruz 7536)
Excellent High Temperature Resistance in Diffusion Process
(Puruz 7537)
Excellent High Temperature Resistance
(Puruz 8010)
For Harsher Plasma and Higher Sealing Loads
(Puruz 9007)
Semi, Solar & LCD
[11]
O-rings
Bonded Slit Valve Door
Gate Valve Seals
Membrane
Gaskets
Robot Pad
Puruz Robot Pad
Spring Seal
Vacuum Pump Parts
Patented Wafer Seal
Patented ESC Sealing Parts
Material
[12]
Acrylonitrile Butadiene Rubber (NBR)
Butyl Rubber
Chloroprene Rubber (CR)
Ethylene Propylene Rubber (EPDM)
Fluoro Elastomers (FKM/FPM)
Fluorosilicone Rubber (FVMQ)
Hydrogenated Acrylonitrile Rubber (HNBR)
Natural Rubber (NR)
Polyacrylate rubber (PA/ACM)
Styrol butadiene rubber (SBR)
Silicone Rubber (VMQ)
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Semi, Solar & LCD
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Semi, Solar & LCD
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O-rings
O-ringsMFC provide customer with perfect material to fit various purpose. High temperature resistance Plasma resistance Low particle generation / highest purity Extended lifetime Cost down purpose Size offer FFKM mold...
Bonded Slit Valve Door
Bonded Slit Valve & Gate Valve DoorApplication:Used on process chamber or load luck for Thin film, etching processProduct Line:Material: Available inPuruz Bonded Slit Valve DoorFKM Bonded Slit Valve Door8" Bonded typ...
Gate Valve Seals
Gate Valve SealCustom Made Sealing Solution for Dynamic seal for LCD and Semi-conductor Industry 1) FKM Gate Valve Seal Special Polymer for Dynamic application Custom made profile to fit grove perfectl...
Membrane
MembraneApplication: CMP process Use specialized abrasion resistant compound Maintain thickness consistence within 0.05mm Can be re-designed for customer-specific application
Gaskets
GasketsApplication: Bumpingprocess (Electroplating)Feature:Special polymer with excellent chemical resistance.Maintain good mechanical properties for the dynamic application to fit customer's requirement.Perfect sealing ...
Robot Pad
Robot PadApplication:Manufacturing Process: Semicon & LCD, Solar Industry, etc.Tool:AKT, ULVAC, TEL, YAC and various tool.Feature: High friction, no slip risk No static electricity No contamination
Puruz Robot Pad
Puruz Robot PadFor semiconductor, LCD process, AKT, ULVAC, and various tools.Feature: High temperature resistance High friction, no slip risk No static electricity No contamination
Spring Seal
Spring SealApplication:Control valve for mass flow control system.Robot cylinder for all process, oil-free environment.Provide more durable elasticity than regular sealing material.
To inquire or purchase, select products on
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