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Bonded Slit Valve & Gate Valve Door

Bonded Slit Valve Door Application:
Used on process chamber or load luck for Thin film, etching process

Product Line:
Material: Available in
Puruz Bonded Slit Valve Door
FKM Bonded Slit Valve Door

 

  
8" Bonded type:
  • Low Particle
  • Prevent metal contact
  • Extend life time
    12" Patented assembly type
  • Easy installation
  • Cost effective solution

 

  
Specially designed to
  • prevent metal to metal contact
  • extend life time
  • minimize abrasion and particle