Product
Patented Puruz® eChuk Ring® Sealing Solutions
Patented Puruz® eChuk Ring® Sealing Solutions
Application:
Dry etching process
Perfect sealing solution for ESC side wall
- Recycle ESC with helium leak
- Cost effective solution
- Helium flow (with patented parts) < 0.5 sccm
- Plasma resistance & high purity
Contact Detail
| Address: | No. 41, Wu-Chuan-Wu Road, New Taipei Industrial Park, New Taipei City 24888, Taiwan |
| TEL: | +886-2-2298-8556 |
| FAX: | +886-2-2299-2189 |
| Email: | mfc@mfc.com.tw |
| URL: | http://www.mfc.com.tw |
| ZIP: | 24888 |
