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Product

Patented eChuk Ring Sealing Solutions

Patented eChuk Ring Sealing Solutions

Patented eChuk Ring Sealing Solutions

Patented eChuk Ring Sealing Solutions

Application:

 

Dry etching process
Perfect sealing solution for ESC side wall

 

  • Recycle ESC with helium leak
  • Cost effective solution
  • Helium flow (with patented parts) < 0.5 sccm
  • Plasma resistance & high purity
  • Prevent silicone damage

Contact Detail
Address:No. 41, Wu-Chuan-Wu Road, New Taipei Industrial Park, New Taipei City 24888, Taiwan
TEL:+886-2-2298-8670
FAX:+886-2-2299-2189
Email:mfc@mfc.com.tw
URL:http://www.mfc.com.tw
ZIP:24888