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- Automotive Parts [15]
- Industrial Parts [15]
- O-Rings / O-Ring Kits [1]
- Oil Seals / Radial Shaft Seals [1]
- Semi, Solar & LCD [11]
- Other Applications [1]
- Puruz [2]
- Puruz Material [10]
- Minimal Particulation in Plasma Process (Puruz 7508 perfluoroelastomer parts)
- Minimal Contamination in Plasma Process (Puruz 7509 perfluoroelastomer parts)
- Conventional Perfluoroelastomer (Puruz 7516)
- Excellent Chemical Resistance in Wet Process (Puruz 7517)
- Minimal Contamination in Plasma Process (Puruz 7529 perfluoroelastomer parts)
- Minimal Contamination in Plasma Process (Puruz 7530 perfluoroelastomer parts)
- Excellent Chemical and Temperature Resistance (Puruz 7536)
- Excellent High Temperature Resistance in Diffusion Process (Puruz 7537)
- Excellent High Temperature Resistance (Puruz 8010)
- For Harsher Plasma and Higher Sealing Loads (Puruz 9007)
- Semi, Solar & LCD [11]
- Puruz Material [10]
- Material [12]
- Acrylonitrile Butadiene Rubber (NBR)
- Butyl Rubber
- Chloroprene Rubber (CR)
- Ethylene Propylene Rubber (EPDM)
- Fluoro Elastomers (FKM/FPM)
- Fluorosilicone Rubber (FVMQ)
- Hydrogenated Acrylonitrile Rubber (HNBR)
- Natural Rubber (NR)
- Polyacrylate rubber (PA/ACM)
- Styrol butadiene rubber (SBR)
- Silicone Rubber (VMQ)
- Materials for Drinking Water (FDA/NSF/WARS)
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Product
Patented ESC Sealing Parts
Patented ESC Sealing Parts
Application:
Dry Etching process-LAM
Perfect sealing solution for ESC side wall
- Recycle ESC with helium leak
- Cost effective solution
- Helium flow (with patented parts) < 0.5 sccm
- Plasma resistance & high purity
- Prevent silicone damage
Perfect sealing solution for ESC side wall
Contact Detail
| Address: | No. 41, Wu-Chuan-Wu Road, New Taipei Industrial Park, New Taipei City, 24888, TAIWAN |
| TEL: | +886-2-2298-8670 |
| FAX: | +886-2-2299-2189 |
| Email: | mfc@mfc.com.tw |
| URL: | http://www.mfc.com.tw |
| ZIP: | 24888 |