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- Minimal Particulation in Plasma Process (Puruz 7508 perfluoroelastomer parts)
- Minimal Contamination in Plasma Process (Puruz 7509 perfluoroelastomer parts)
- Conventional Perfluoroelastomer (Puruz 7516)
- Excellent Chemical Resistance in Wet Process (Puruz 7517)
- Minimal Contamination in Plasma Process (Puruz 7529 perfluoroelastomer parts)
- Minimal Contamination in Plasma Process (Puruz 7530 perfluoroelastomer parts)
- Excellent Chemical and Temperature Resistance (Puruz 7536)
- Excellent High Temperature Resistance in Diffusion Process (Puruz 7537)
- Excellent High Temperature Resistance (Puruz 8010)
- For Harsher Plasma and Higher Sealing Loads (Puruz 9007)
- Semi, Solar & LCD [11]
- Puruz Material [10]
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Product
Minimal Particulation in Plasma Process
Product ID: Puruz 7508 perfluoroelastomer parts
Puruz 7508 is a compound specifically developed for select semiconductor plasma and gas deposition processes. This ultra-pure compound offers excellent chemical compatibility and very low particle generation in oxygen and fluorine containing plasmas versus those mineral-filled compounds. It is well-suited for both static and low stress/low sealing force applications, i.e., slit valve door, gas feed-through, chamber lid, etc. It remains stable at service temperatures as high as 200°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7508.
Applications:
- Slit valve doors
- Gas inlet seals
- Window seals
- KF fitting seals
- Gas feed-through seals
- Chamber seals
- Isolator valve seals
- Lid seals
Recommended Processes
- Deposition: CVD, APCVD, HDPCVD..., PVD
- Plasma etching: Oxide, Metal, Poly
- Stripping
- Ion implant
- Remote plasma cleans
Features:
- Excellent oxygen, chlorine, and fluorine compatibility
- Ultra-low particle generation
- Excellent chemical and physical properties
- Low out-gassing
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Contact Detail
| Address: | No. 41, Wu-Chuan-Wu Road, New Taipei Industrial Park, New Taipei City, 24888, TAIWAN |
| TEL: | +886-2-2298-8670 |
| FAX: | +886-2-2299-2189 |
| Email: | mfc@mfc.com.tw |
| URL: | http://www.mfc.com.tw |
| ZIP: | 24888 |