Thank you for visiting our website. Your personal privacy is absolutely respected and protected by the website. To help you understand how the website collects, uses and protects your personal information, be sure to read the website "Privacy Policy". Thank you!
ACCEPT AND PROCEED
  • 繁體中文
  • RSSRSS

Product

Minimal Contamination in Plasma Process

Minimal Contamination in Plasma Process

Minimal Contamination in Plasma Process

Product ID: Puruz® P325 perfluoroelastomer parts

Specifically designed for plasma and gas deposition processes, the Puruz® P325 features excellent seal reliability and minimal contamination. Its properties include minimal particle generation in oxygen and fluorine containing plasmas as well as excellent chemical compatibility. In addition, the Puruz P325 is offered in various geometries and cross sections and is particularly well suited for static and dynamic applications such as slit valve door, gas feed-through, chamber lids, etc. It remains stable at service temperatures as high as 275°C. Puruz P325-made parts are adapted for Class 100 post-cleaning and packaging.

 

Applications:

  • Slit valve doors
  • Gas inlet seals
  • Window seals
  • KF fitting seals
  • Gas feed-through seals
  • Chamber seals
  • Isolator valve seals
  • Lid seals

 

Recommended Processes

  • Deposition: CVD, APCVD, HDPCVD..., PVD
  • Plasma etching: Oxide, Metal, Poly
  • Ashing
  • Ion implant
  • Remote plasma cleans

 

Features:
  • Excellent oxygen, chlorine, and fluorine compatibility
  • Minimal particle generation
  • Excellent chemical and physical properties
  • Unlimited design flexibility
  • Low out-gassing
Typical Physical Properties1
Physical Typical Value
Color White
Hardness, Shore A2 75
Mechanical3  
Tensile Strength, MPa 15.6
Elongation, % 188
100% Modulus, MPa 5.85
Compression Set4:
70 hours @ 200°C @ 25% Deflection

16
Thermal  
Service Temperature Range -20°C~275°C
1 Accumulated Average data.
2 ASTM D2240 (AS 568A 214 O-ring test specimens)
3 ASTM D412 (Dumbbell test specimens)
4 ASTM D395B and ASTM D1414 (AS 568A 214 O-ring test specimens)
Any suggestions made regarding material selections or part designs in this literature are offered as suggestions only based on our experience and understanding of standard application. It is the responsibility of the user to determine full compliance in their particular use. MFC offers no expressed or implied warranties concerning form, fit, or function of any product in any application
Contact Detail
Address:No. 41, Wu-Chuan-Wu Road, New Taipei Industrial Park, New Taipei City 24888, Taiwan
TEL:+886-2-2298-8556
FAX:+886-2-2299-2189
Email:mfc@mfc.com.tw
URL:http://www.mfc.com.tw
ZIP:24888