Excellent High Temperature Resistance
Excellent High Temperature Resistance
Product ID: Puruz 8010
Puruz 8010 is a carbon black-filled compound with good mechanical properties, and low compression set for general-purpose use in o-rings, diaphragms, seals, and other parts used in the semi- and TFT-LCD industries. It exhibits good response to temperature cycling effects and is well-suited for both static and dynamic applications, i.e., slit valve door, gas feed-through, chamber seal, etc. It remains stable at service temperatures as high as 315°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 8010. This compound is not recommended for use in aggressive acid/base wet processes.
Applications:
- Valve seals
- V-seals
- Bell jar seals
- Filter seals
- Chamber seals
- Lid seals
- Gas inlet seals
- Isolator valve seal
- End point windows
- Slit Valve seals
- Window seals
- KF fitting seals
Recommended Processes
- Deposition: CVD, PVD
- Plasma etching: Oxide, Metal, Poly
- Ion implant
- Diffusion
- Rapid thermal process
- Dry etching