Product

Excellent High Temperature Resistance in Diffusion Process

Excellent High Temperature Resistance in Diffusion Process

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Product ID: Puruz P340

Puruz P340 is a special compound which exhibits high temperature resistance and is well-suited for both static and dynamic applications. It remains stable at service temperatures as high as 324°C, and has a low compression set for use in extreme diffusion, CVD, and dry processes. Class 100 post-cleaning and packaging is adapted for parts made from Puruz P340.

Applications:

• Valve seals
• V-seals
• Bell jar seals
• Filter seals
• Chamber seals
• Lid seals
• Gas inlet seals
• Isolator valve seal
• End point windows
• Slit Valve seals
• Window seals
• KF fitting seals

Recommended Processes

• Deposition: CVD, APCVD, HDPCVD..., PVD
• Plasma etching: Oxide, Metal, Poly
• Ashing
• Ion implant
• Remote plasma cleans
• Diffusion
• Rapid thermal process
• Annealing