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ACCEPT AND PROCEED
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Product

Excellent Chemical and Temperature Resistance

Excellent Chemical and Temperature Resistance

Excellent Chemical and Temperature Resistance

Product ID: Puruz® P335

Puruz® P335 is a specific compound boasting good chemical and mechanical properties. It features: low compression set for general purpose use in o-rings, diaphragms, seals and other semiconductor and TFT-LCD components, good response to temperature cycling effects, stability at service temperatures as high as 260°C, and excellent chemical resistance with minimal metal extraction. It is well suited for both static and dynamic applications such as slit valve doors, gas feed-throughs, chamber seals, etc. Class 100 post-cleaning and packaging is adapted for parts made from Puruz P335.

 

Applications:
  • Valve seals
  • V-seals
  • Bell jar seals
  • Filter seals
  • Chamber seals
  • Lid seals
  • Gas inlet seals
  • Isolator valve seal
  • End point windows
  • Slit Valve seals
  • Window seals
  • KF fitting seals

 

Recommended Processes
  • Deposition: CVD, APCVD, HDPCVD..., PVD
  • Plasma etching: Oxide, Metal, Poly
  • Ashing
  • Ion implant
  • Remote plasma cleans
  • Rapid thermal process
  • Wet stripper
  • Wet etching
  • Wet cleaning

  

Features:
  • Excellent chemical resistance
  • Excellent physical properties
  • Minimal metal extraction
  • Low out-gassing
Typical Physical Properties1
Physical Typical Value
Color Black
Hardness, Shore A2 80
Mechanical3  
Tensile Strength, MPa 14.7
Elongation, % 130
100% Modulus, MPa 12.3
Compression Set4:
70 hours @ 200°C @ 25% Deflection

16
Thermal  
Service Temperature Range -20°C~260°C
1 Accumulated Average data.
2 ASTM D2240 (AS 568A 214 O-ring test specimens)
3 ASTM D412 (Dumbbell test specimens)
4 ASTM D395B and ASTM D1414 (AS 568A 214 O-ring test specimens)
Any suggestions made regarding material selections or part designs in this literature are offered as suggestions only based on our experience and understanding of standard application. It is the responsibility of the user to determine full compliance in their particular use. MFC offers no expressed or implied warranties concerning form, fit, or function of any product in any application
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URL:http://www.mfc.com.tw
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