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7530 perfluoroelastomer parts
Minimal Contamination in Plasma Process

Puruz 7530
Compound Description
Puruz 7530 is a compound specifically developed for deposition processes. It has also exhibited excellent etching and stripping process applications. This material provides excellent chemical compatibility and is available in an infinite geometries and cross sections. It has been specifically formulated for ultra-low particle generation in oxygen and fluorine containing plasmas and is well-suited for both static and dynamic applications, i.e., slit valve door, gas feed-through, chamber lid, etc. It remains stable at service temperatures as high as 230°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7530.
Features
  • Excellent oxygen, chlorine, and fluorine compatibility
  • Ultra-low particle generation
  • Excellent chemical and physical properties
  • Unlimited design flexibility
  • Low out-gassing
    		•
    Applications
  • Slit valve doors
  • Gas inlet seals
  • Window seals
  • KF fitting seals
  • Gas feed-through seals
  • Chamber seals
  • Isolator valve seals
  • Lid seals
    		•
    Recommended Processes
  • Deposition: CVD, APCVD, HDPCVD..., PVD
  • Plasma etching: Oxide, Metal, Poly
  • Ashing
  • Ion implant
  • Remote plasma cleans
    		•
    Typical Physical Properties1
    Physical Typical Value
    Color Gray Yellow
    Specific 2.02
    Hardness, Shore A2 75
    Mechanical3  
    Tensile Strength, MPa 15.2
    Elongation, % 198
    100% Modulus, MPa 5.72
    Compression Set4:
    70 hours @ 200°C @ 25% Deflection, %
    21
    Thermal  
    Service Temperature Range -20°C~230°C
    1 Accumulated Average data.
    2 ASTM D2240 (AS 568A 214 O-ring test specimens)
    3 ASTM D412 (Dumbbell test specimens)
    4 ASTM D395B and ASTM D1414 (AS 568A 214 O-ring test specimens)
    Any suggestions made regarding material selections or part designs in this literature are offered as suggestions only based on our experience and understanding of standard application. It is the responsibility of the user to determine full compliance in their particular use. MFC offers no expressed or implied warranties concerning form, fit, or function of any product in any application