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7516
Conventional Perfluoroelastomer

Puruz 7516
Compound Description
Puruz 7516 is a compound which is designed for use in wide variety of applications. This product exhibits excellent chemical resistance with minimal metal extraction and good mechanical properties, and is well-suited for both static and dynamic applications. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7516.
Features
  • Excellent plasma resistance
  • Excellent chemical resistance
  • Excellent physical properties
  • Minimal metal extraction
  • Low out-gassing
    		•
    Applications
  • Slit valve doors
  • Gas inlet seals
  • Window seals
  • KF fitting seals
  • Gas feed-through seals
  • Chamber seals
  • Isolator valve seals
  • Lid seals
    		•
    Recommended Processes
  • Deposition: CVD, APCVD, HDPCVD..., PVD
  • Plasma etching: Oxide, Metal, Poly
  • Ashing
  • Ion implant
  • Remote plasma cleans
  • Rapid thermal process
  • Wet metal plating
    		•
    Typical Physical Properties1
    Physical Typical Value
    Color White
    Specific 2.42
    Hardness, Shore A2 78
    Mechanical3  
    Tensile Strength, MPa 16.5
    Elongation, % 176
    100% Modulus, MPa 9.9
    Compression Set4:
    70 hours @ 200°C @ 25% Deflection, %
    22
    Thermal  
    Service Temperature Range -20°C~230°C
    1 Accumulated Average data.
    2 ASTM D2240 (AS 568A 214 O-ring test specimens)
    3 ASTM D412 (Dumbbell test specimens)
    4 ASTM D395B and ASTM D1414 (AS 568A 214 O-ring test specimens)
    Any suggestions made regarding material selections or part designs in this literature are offered as suggestions only based on our experience and understanding of standard application. It is the responsibility of the user to determine full compliance in their particular use. MFC offers no expressed or implied warranties concerning form, fit, or function of any product in any application