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7509 perfluoroelastomer parts
Minimal Contamination in Plasma Process

Puruz 7509
Compound Description
Puruz 7509 is a compound specifically developed for select semiconductor plasma and gas deposition processes. This ultra-pure compound offers excellent chemical compatibility and very low particle generation in oxygen and fluorine containing plasmas. It is well-suited for both static and low stress/low sealing force applications, i.e., slit valve door, gas feed-through, chamber lid, etc where temperatures do not exceed 200°C. Class 100 post-cleaning and packaging is adapted for parts made from Puruz 7509.
Features
  • Excellent oxygen, chlorine, and fluorine compatibility
  • Low particle generation
  • Excellent chemical and physical properties
  • Low out-gassing
    		•
    Applications
  • Slit valve doors
  • Gas inlet seals
  • Window seals
  • KF fitting seals
  • Gas feed-through seals
  • Chamber seals
  • Isolator valve seals
  • Lid seals
    		•
    Recommended Processes
  • Deposition: CVD, APCVD, HDPCVD..., PVD
  • Plasma etching: Oxide, Metal, Poly
  • Stripping
  • Ion implant
  • Remote plasma cleans
  • Wet metal plating
    		•
    Typical Physical Properties1
    Physical Typical Value
    Color White
    Specific 1.97
    Hardness, Shore A2 76
    Mechanical3  
    Tensile Strength, MPa 16.7
    Elongation, % 380
    100% Modulus, MPa 3.01
    Compression Set4:
    70 hours @ 200°C @ 25% Deflection, %
    35
    Thermal  
    Service Temperature Range -20°C~200°C
    1 Accumulated Average data.
    2 ASTM D2240 (AS 568A 214 O-ring test specimens)
    3 ASTM D412 (Dumbbell test specimens)
    4 ASTM D395B and ASTM D1414 (AS 568A 214 O-ring test specimens)
    Any suggestions made regarding material selections or part designs in this literature are offered as suggestions only based on our experience and understanding of standard application. It is the responsibility of the user to determine full compliance in their particular use. MFC offers no expressed or implied warranties concerning form, fit, or function of any product in any application